Title :
9.2: Fabrication techniques for a THz EIK
Author :
Dobbs, Richard ; Roitman, Albert ; Horoyski, Peter ; Hyttinen, Mark ; Sweeney, Dan ; Chernin, David ; Blank, Monica ; Barker, N. Scott ; Booske, John ; Wright, Edward ; Calame, Jeffrey ; Makarova, Olga V.
Author_Institution :
Commun. & Power Ind. Canada, Georgetown, ON, Canada
Abstract :
To produce an EIK working at THz frequencies, departure from traditional fabrication techniques is required. This paper describes the investigation and results of various fabrication techniques and their suitability for application in a VED.
Keywords :
klystrons; ultraviolet lithography; EIK; fabrication techniques; terahertz frequency; Bonding; Circuits; Electrodes; Fabrication; Frequency; Laboratories; Power industry; Resists; Wire; X-ray lithography; EDM; EIK; Micromachining; THz; UV Lithography; X-Ray Lithography;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2010 IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-7098-3
DOI :
10.1109/IVELEC.2010.5503544
