Title :
P1–36: Evaluation of Ba/BaO of oxide cathode evaporation with quadrupole mass spectrometer
Author :
Xiao, Mei ; Zhang, Xiaobing ; Lei, Wei ; Peng xiang Wang
Author_Institution :
Jiangsu Inf. Display Eng. Res. Center, Southeast Univ., Nanjing, China
Abstract :
A quantitative analysis of the Ba/BaO in cathode evaporation is important. Quadrupole mass spectrometer (QMS) is best overall tool which can distinguish Ba and BaO. But Ba and BaO´s ion current ratio do not represent mass flow ratio in cathode evaporation. In this paper, we propose a methodology to evaluate the Ba/BaO mass ratio from QMS´ ion current´s signals.
Keywords :
barium; barium compounds; evaporation; mass spectrometers; oxide coated cathodes; Ba-BaO; QMS; ion current ratio; mass flow ratio; oxide cathode evaporation; quadrupole mass spectrometer; quantitative analysis; Atomic measurements; Barium; Cathodes; Chemistry; Displays; Electrons; Information analysis; Ionization chambers; Mass spectroscopy; Physics; barium evaporation; cathode; quadrupole mass spectrometer;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2010 IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-7098-3
DOI :
10.1109/IVELEC.2010.5503547
