• DocumentCode
    2927457
  • Title

    Room-temperature Preparation of β-FeSi2 Microdroplets-containing Films via Excimer Laser Deposition and Annealing

  • Author

    Narazaki, A. ; Sato, T. ; Kawaguchi, Y. ; Niino, H.

  • Author_Institution
    National Institute of Advanced Industrial Science and Technology (AIST), Japan; narazaki-aiko@aist.go.jp
  • fYear
    2005
  • fDate
    14-14 July 2005
  • Firstpage
    1540
  • Lastpage
    1541
  • Abstract
    Room-temperature fabrication of a β-FeSi2microdroplets-containing film was achieved by the active use of micro-droplets. Successive laser annealing increased the Raman intensity from the β-FeSi2droplets up to fivefold, indicating further improvement in crystallinity.
  • Keywords
    Annealing; Crystallization; Laser ablation; Pulsed laser deposition; Scanning electron microscopy; Spectroscopy; Substrates; Surface emitting lasers; Surface morphology; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    0-7803-9242-6
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2005.1569809
  • Filename
    1569809
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2927457