Title :
Fabrication of micro-lenses in quartz
Author :
Lippert, T. ; Kopitkovas, G. ; David, C. ; Wokaun, A. ; Gobrecht, J.
Author_Institution :
Paul Scherrer Institut, Switzerland thomas.lippert@psi.ch
Abstract :
A one-step micromachining process, which utilizes laser assisted chemical wet etching is applied for the fabrication of plano-convex micro-lens arrays in quartz, which are used as beam homogenizers for high power lasers.
Keywords :
Chemical lasers; Dielectric materials; Laser beams; Lenses; Optical arrays; Optical device fabrication; Optical refraction; Power lasers; Temperature; Wet etching;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569835
