Title :
Formation of Micro-bumps on the Surface of Densified Silica Glass by CO Laser Irradiation
Author :
Kitamura, Naoyuki ; Fukumi, Kohei ; Nishii, Junji
Author_Institution :
National Institute of Advanced Industrial Science and Technology, Japan naoyuki.kitamura@aist.go.jp
Abstract :
Structural relaxation has been performed on the surface of high-pressure densified silica glass by the CO laser beam irradiation. Micro-bumps with Gaussian shape were formed on the glass surface after the laser irradiation. Micro-bumps were successfully arrayed at an interval of 25 µm. This demonstrates us a novel method to produce micro-lens array.
Keywords :
CO laser; Micro-lens array; Silica glass; Structural relaxation; Glass; Laser ablation; Laser beams; Laser modes; Laser theory; Optical surface waves; Rough surfaces; Silicon compounds; Surface emitting lasers; Surface roughness; CO laser; Micro-lens array; Silica glass; Structural relaxation;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569836
