Title :
A Novel Profilometry Using Frequency Comb Light Source
Author :
Choi, Samuel ; Yamamoto, Mitsufumi ; Moteki, Daisuke ; Shioda, Tatsutoshi ; Tanaka, Yosuke ; Takeda, Mitsuo ; Kurokawa, Takashi
Author_Institution :
Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi, Tokyo 184-8588 Japan
Abstract :
A novel profilometry using a frequency comb light source is proposed. This method realizes step height measurement without mechanical scanning. We have confirmed the system with high accuracy with this method.
Keywords :
Dynamic range; Fourier transforms; Frequency measurement; Frequency modulation; Light sources; Mechanical variables measurement; Optical interferometry; Optical modulation; Signal detection; Signal resolution;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569855
