DocumentCode
2928269
Title
A Novel Profilometry Using Frequency Comb Light Source
Author
Choi, Samuel ; Yamamoto, Mitsufumi ; Moteki, Daisuke ; Shioda, Tatsutoshi ; Tanaka, Yosuke ; Takeda, Mitsuo ; Kurokawa, Takashi
Author_Institution
Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi, Tokyo 184-8588 Japan
fYear
2005
fDate
30-02 Aug. 2005
Firstpage
1688
Lastpage
1690
Abstract
A novel profilometry using a frequency comb light source is proposed. This method realizes step height measurement without mechanical scanning. We have confirmed the system with high accuracy with this method.
Keywords
Dynamic range; Fourier transforms; Frequency measurement; Frequency modulation; Light sources; Mechanical variables measurement; Optical interferometry; Optical modulation; Signal detection; Signal resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN
0-7803-9242-6
Type
conf
DOI
10.1109/CLEOPR.2005.1569855
Filename
1569855
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