DocumentCode
2928348
Title
Imaging Interferometric Microscopy
Author
Kuznetsova, Yulya ; Neumann, Alexander ; Brueck, S.R.J.
Author_Institution
Center for High Technology Materials, University of Inst New Mexico, Albuquerque, New Mexico, USA; kuzn@chtm.unm.edu
fYear
2005
fDate
30-02 Aug. 2005
Firstpage
1697
Lastpage
1698
Abstract
The imaging interferometric microscopy (IIM) allows to get high-resolution images using low NA objectives. We demonstrate approaching to the λ/4 resolution with NA = 0.4 objective.
Keywords
Coherent microscopy; coherent imaging; interferometric microscopy; off-axes illumination; Focusing; Frequency; High-resolution imaging; Interferometric lithography; Lighting; Microscopy; Optical filters; Optical imaging; Optical interferometry; Spatial resolution; Coherent microscopy; coherent imaging; interferometric microscopy; off-axes illumination;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN
0-7803-9242-6
Type
conf
DOI
10.1109/CLEOPR.2005.1569859
Filename
1569859
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