Title :
Imaging Interferometric Microscopy
Author :
Kuznetsova, Yulya ; Neumann, Alexander ; Brueck, S.R.J.
Author_Institution :
Center for High Technology Materials, University of Inst New Mexico, Albuquerque, New Mexico, USA; kuzn@chtm.unm.edu
Abstract :
The imaging interferometric microscopy (IIM) allows to get high-resolution images using low NA objectives. We demonstrate approaching to the λ/4 resolution with NA = 0.4 objective.
Keywords :
Coherent microscopy; coherent imaging; interferometric microscopy; off-axes illumination; Focusing; Frequency; High-resolution imaging; Interferometric lithography; Lighting; Microscopy; Optical filters; Optical imaging; Optical interferometry; Spatial resolution; Coherent microscopy; coherent imaging; interferometric microscopy; off-axes illumination;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569859
