Title :
Polarization-Shifting Profilometer
Author :
Teng, Hui-Kang ; Lang, Kuo-Chen ; Yen, Chun-Chen
Author_Institution :
Electrical Engineering Department, Nan-Kai Institute of Technology, Nan-tou, Taiwan, ROC
Abstract :
A high sensitive Michelson interferometer with polarization shifting approach is proposed to determine the surface profile of optical devices with real time capability. The depth resolution in nanometer range and the lateral resolution smaller than 3 micrometer is demonstrated experimentally.
Keywords :
Atomic force microscopy; Azimuth; Laser beams; Optical devices; Optical filters; Optical interferometry; Optical polarization; Optical surface waves; Phase shifting interferometry; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569860
