Title :
High-Aspect Ratio Nanofabrication by Femtosecond Irradiation
Author :
Juodkazis, Saulius ; Kondo, Toshiaki ; Misawa, Hiroaki
Author_Institution :
CREST-JST & RIES, Hokkaido Univ., Sapporo 001-0021, Japan; saulius@es.hokudai.ac.jp
Keywords :
Holographic optical components; Holography; Nanofabrication; Optical distortion; Optical films; Optical pulses; Optical recording; Pulse amplifiers; Resists; Surface tension;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569872