Title :
Surface structures of femtosecond laser irradiated 4H-SiC crystal
Author :
Tomita, Takuro ; Kinoshita, Keita ; Matsuo, Shigeki
Author_Institution :
The University of Tokushima, Japan tomita@eco.tokushima-u.ac.jp
Abstract :
Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.
Keywords :
Laser beams; Optical pulses; Periodic structures; Polarization; Pulse amplifiers; Scanning electron microscopy; Silicon carbide; Surface emitting lasers; Surface morphology; Surface structures;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569875
