DocumentCode
2928610
Title
Surface structures of femtosecond laser irradiated 4H-SiC crystal
Author
Tomita, Takuro ; Kinoshita, Keita ; Matsuo, Shigeki
Author_Institution
The University of Tokushima, Japan tomita@eco.tokushima-u.ac.jp
fYear
2005
fDate
30-02 Aug. 2005
Firstpage
1744
Lastpage
1745
Abstract
Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.
Keywords
Laser beams; Optical pulses; Periodic structures; Polarization; Pulse amplifiers; Scanning electron microscopy; Silicon carbide; Surface emitting lasers; Surface morphology; Surface structures;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN
0-7803-9242-6
Type
conf
DOI
10.1109/CLEOPR.2005.1569875
Filename
1569875
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