DocumentCode
2929104
Title
High-precision imaging interferometer for short gauge blocks
Author
Malinovsky, I. ; Titov, A. ; Massone, C.A.
Author_Institution
INMETRO, Rio de Janeiro, Brazil
fYear
1998
fDate
6-10 July 1998
Firstpage
48
Lastpage
49
Abstract
Interferometric image-analyzing comparator for short gauge blocks is reported. Sophisticated image acquisition and processing software that supports 0.1 nm (/spl lambda//6000) resolution in central length and 1 nm in 3D measurements is developed. Best stability achieved is about 10/sup -9/. Inclination error is minimized and can be measured at 8/spl times/10/sup -9/ uncertainty or better.
Keywords
computerised instrumentation; data acquisition; image processing; light interferometers; spatial variables measurement; stability; 3D measurement; image acquisition; image-analyzing comparator; imaging interferometer; inclination error; processing software; short gauge blocks; stability; Atmospheric measurements; Charge coupled devices; Humidity; Length measurement; Noise reduction; Optical interferometry; Stability; Temperature measurement; Temperature sensors; White noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location
Washington, DC, USA
Print_ISBN
0-7803-5018-9
Type
conf
DOI
10.1109/CPEM.1998.699769
Filename
699769
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