Title :
High-precision method for gauge block measurements and comparison of gauge block interferometers
Author :
Malinovsky, I. ; Titov, A. ; Massone, C.A.
Author_Institution :
INMETRO, Rio de Janeiro, Brazil
Abstract :
A precise method, intended for nanometer accuracy in gauge block length measurements, has been realized. Results of the measurements are corrected on distortions in interferometer optics and are not affected by the quality of wringing and deformation of the reference plate. Accuracy limitations of the conventional method are outlined.
Keywords :
calibration; length measurement; light interferometers; measurement standards; measurement uncertainty; SI length unit; accuracy limitations; distortions in interferometer optics; error elimination; gauge block interferometers; gauge block measurements; high-precision method; length measurement; nanometer accuracy; uncertainty; Coordinate measuring machines; Distortion measurement; Interferometers; Lab-on-a-chip; Length measurement; Mechanical variables measurement; Optical distortion; Optical interferometry; Petroleum; Reproducibility of results;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.699770
