Development of plasmonics-active SERS substrates on a wafer scale for chemical and biological sensing applications

This paper describes the fabrication of highly efficient plasmonics-active SERS substrates - having metallic nanowire structures with pointed geometries and sub-5 nm gap between the metallic nanowires enabling concentration of high EM fields in these regions - on a wafer-scale by a reproducible process that is compatible with large-scale development of these substrates. These SERS substrates were employed for detecting chemical and biological molecules of interest.