Selectively electrical deposition copper on UV laser induced polyimide

Summary form only given.With the rapid growth of miniaturization in the electronics industry, the electronics manufacturer are improving their packaging and assembly technique using the precise and high photon energy of laser process. Recent reports showed that the conductivity of some polymers such as PI can be increased up to 16 orders of magnitude by UV laser. However, the conductivity of laser induced polyimide is not good enough to be applied directly in the electrical industry. In order to improve such conductivity and find the feasible technique for manufacture industry, we tried electroplating copper on the laser induced polyimide surface so that we can get the as high conductivity as that of the metal. In the experiment, we used KrF (248 nm) laser to induce the polyimide (Dupond) under the threshold fluency of 35 mJ/cm/sup 2/ with more than 1000 shots in order to achieve its saturation conductivity.