Wavelength trimming and controlled temperature dependence of micromachined AlGaAs/GaAs vertical cavity filter

Summary form only given. A tunable Fabry-Perot filter or vertical cavity surface emitting laser (VCSEL) with a macro-machined distributed Bragg reflector (DBR) has been studied for future WDM networking. It is desirable to avoid any temperature controllers for cost reduction as well as for high reliability. Also, the post-process adjustment of filter response, the so-called "wavelength trimming," is needed in such a temperature insensitive filter. We proposed a novel technique of wavelength stabilization and wavelength trimming in a VCSEL using a micromachined DBR mirror tuned by a differential thermal expansion. We demonstrate the wavelength trimming of a micromachined GaAlAs/GaAs filter for the first time, which also shows adjustable temperature dependence.