Title :
Femtosecond laser ablation of graphite: study of the plasma plume and thin films deposition
Author :
Garrelie, F. ; Jonin, C. ; Baubeau, E. ; Audouard, E. ; Laporte, P. ; Catherinot, A. ; Champeaux, C.
Author_Institution :
Lab. Traitement du Signal et Instrum., Jean Monnet Univ., Saint Etienne, France
Abstract :
Summary form only given. Pulsed laser deposition (PLD) has number of advantages over conventional thin films deposition techniques (operationally simple, thickness and film properties control, low substrate temperature). Using ultrashort laser pulses, one may add some more interesting properties such as very high quality and improved film adhesion on substrates. At this range of power density on the target (5 GW peak focused onto a 100 /spl mu/m diameter spot) and time scale, laser-matter interaction differs strongly from the case of "long pulses" (i.e., longer than a few picosecond). In particular, nonlinear processes (multiphoton ionization) play a major role in ablation, thermal processes being drastically reduced. We report study of femtosecond-laser ablation of a carbon target and deposition of carbon thin films.
Keywords :
adhesion; carbon; graphite; high-speed optical techniques; insulating thin films; plasma production by laser; pulsed laser deposition; 100 mum; 5 GW; C; C target; C thin films; ablation; femtosecond laser ablation; femtosecond-laser ablation; film adhesion; film properties control; graphite; laser-matter interaction; long pulses; low substrate temperature; multiphoton ionization; nonlinear processes; operationally simple technique; plasma plume; power density; pulsed laser deposition; substrates; target; thermal processes; thickness control; thin films deposition; time scale; ultrashort laser pulses; very high quality; Laser ablation; Optical control; Optical pulses; Plasma properties; Plasma temperature; Pulsed laser deposition; Sputtering; Substrates; Temperature control; Thickness control;
Conference_Titel :
Lasers and Electro-Optics, 2000. (CLEO 2000). Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-634-6
DOI :
10.1109/CLEO.2000.907465