DocumentCode :
2931438
Title :
UHF acoustic attenuation and quality parameter limits in the diamond based HBAR
Author :
Telichko, Arseniy ; Sorokin, Boris ; Kvashnin, Gennagy
Author_Institution :
Moscow Inst. of Phys. & Technol., Dolgoprudny, Russia
fYear :
2015
fDate :
12-16 April 2015
Firstpage :
94
Lastpage :
99
Abstract :
Ultra high frequency attenuation limits in synthetic IIa diamond single crystal were studied. The investigations were provided by High-overtone Bulk Acoustic Resonator “Al/AlN/Mo/(100) diamond”. It was shown, that the change of Akhiezer´s attenuation regime to Landau-Rumer one takes place at f ≈ 1 GHz. The experimental results on the quality parameter showed Q×f ≈ 1.8·1013 Hz for Akhiezer´s regime, and Q×f ≈ f×1.8·104 Hz for Landau-Rumer regime. As a consequence on a higher frequencies diamond single crystal has more preferred acoustic parameters including a lower acoustic attenuation in comparison with known acoustoelectronic materials.
Keywords :
acoustic resonators; aluminium; aluminium compounds; bulk acoustic wave devices; diamond; molybdenum; Akhiezer attenuation regime; Al-AlN-Mo; HBAR; Landau-Rumer regime; UHF acoustic attenuation; acoustoelectronic material; diamond; high-overtone bulk acoustic resonator; quality parameter limit; synthetic IIa diamond single crystal; ultrahigh frequency attenuation limit; Acoustics; Aluminum nitride; Attenuation; Crystals; Diamonds; Frequency dependence; III-V semiconductor materials; AlN; HBAR; Kikuchi lines; UHF; acoustic attenuation; damage layer; diamond;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4799-8865-5
Type :
conf
DOI :
10.1109/FCS.2015.7138799
Filename :
7138799
Link To Document :
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