Title :
Exploring the limits and practicality of Q-based temperature compensation for silicon resonators
Author :
Salvia, J. ; Messana, M. ; Ohline, M. ; Hopcroft, M.A. ; Melamud, R. ; Chandorkar, S. ; Lee, H.K. ; Bahl, G. ; Murmann, B. ; Kenny, T.W.
Author_Institution :
Stanford Univ., Stanford, CA
Abstract :
We investigate using quality factor as a thermometer in embedded temperature compensation systems for micromechanical silicon resonator-based frequency references. Our compensated 1.3 MHz prototype oscillator, implemented on a single printed circuit board, achieves temperature stability of plusmn1 ppm from 0degC to 70degC after multipoint calibration or plusmn25 ppm after single point calibration. Drawbacks and limitations of the compensation schemes are discussed.
Keywords :
Q-factor; cavity resonators; compensation; micromechanical resonators; radiofrequency oscillators; temperature measurement; Q-based embedded temperature compensation; Si; frequency 1.3 MHz; micromechanical silicon resonator-based frequency references; oscillator; printed circuit board; quality factor; resonators; temperature 0 degC to 70 degC; temperature stability; thermometer; Calibration; Circuit stability; Micromechanical devices; Oscillators; Printed circuits; Prototypes; Q factor; Resonant frequency; Silicon; Temperature;
Conference_Titel :
Electron Devices Meeting, 2008. IEDM 2008. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-2377-4
Electronic_ISBN :
8164-2284
DOI :
10.1109/IEDM.2008.4796783
