High piezoelectric properties in LiNbO3 transferred layer by the Smart Cut™ technology for ultra wide band BAW filter applications

Author

Moulet, J.S. ; Pijolat, M. ; Dechamp, J. ; Mazen, F. ; Tauzin, A. ; Rieutord, F. ; Reinhardt, A. ; Defaÿ, E. ; Deguet, C. ; Ghyselen, B. ; Clavelier, L. ; Aïd, M. ; Ballandras, S. ; Mazuré, C.

Author_Institution

SOITEC SA, Crolles

fYear

2008

fDate

15-17 Dec. 2008

Firstpage

1

Lastpage

4

Abstract

For the first time, high overtone bulk acoustic resonators (HBAR) based on thin homogeneous and single crystalline films (below 1mum) of lithium niobate (LiNbO₃) have been processed and characterized between 1 and 4 GHz. k_t ² greater than 30% are extracted from the frequency response envelope, by far superior to k_t ² usually obtained with traditional deposited AlN material (limited to 7%). This result confirms the interest of this technology for ultra wide band BAW (bulk acoustic wave) filters. The thin single crystalline LiNbO₃ films together with an embedded metal electrode were fabricated using the Smart Cuttrade technology. The crystalline quality of the transferred layer (characterized by XRD and HRTEM) was found to be comparable to the single crystal bulk starting material.

Keywords

X-ray diffraction; acoustic filters; acoustic resonators; bulk acoustic wave devices; crystal filters; crystal resonators; lithium compounds; piezoelectric materials; piezoelectric thin films; transmission electron microscopy; HRTEM; LiNbO₃; Smart Cut technology; XRD; crystalline quality; high overtone bulk acoustic resonators; lithium niobate; piezoelectric properties; thin single crystalline films; ultrawide band BAW filter applications; Acoustic materials; Acoustic waves; Crystalline materials; Crystallization; Film bulk acoustic resonators; Filters; Frequency response; Lithium niobate; Piezoelectric films; Ultra wideband technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2008. IEDM 2008. IEEE International

Conference_Location

San Francisco, CA

ISSN

8164-2284

Print_ISBN

978-1-4244-2377-4

Electronic_ISBN

8164-2284

Type

conf

DOI

10.1109/IEDM.2008.4796785

Filename

4796785