DocumentCode :
2931875
Title :
Record PVCR GaAs-based tunnel diodes fabricated on Si substrates using aspect ratio trapping
Author :
Rommel, S.L. ; Pawlik, D. ; Thomas, P. ; Barth, M. ; Johnson, K. ; Kurinec, S.K. ; Seabaugh, A. ; Cheng, Z. ; Li, J.Z. ; Park, J.-S. ; Hydrick, J.M. ; Bai, J. ; Carroll, M. ; Fiorenza, J.G. ; Lochtefeld, A.
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., Rochester, NY
fYear :
2008
fDate :
15-17 Dec. 2008
Firstpage :
1
Lastpage :
4
Abstract :
High quality, low defect GaAs virtual substrates on Si, produced by the aspect ratio trapping growth technique, have been used for the fabrication of n+GaAs/n+InGaAs/p+GaAs Esaki diodes. All epitaxial layers were grown by reduced-pressure chemical vapor deposition/metalorganic chemical vapor deposition , instead of the molecular beam epitaxy technique commonly used for most high performance Esaki diodes. Four Esaki diode structures were fabricated and measured, with current densities up to 1 kA/cm2. Peak-to-valley current ratios up to 56 have been achieved, which is greater than twice that of the best GaAs Esaki diodes previously reported.
Keywords :
III-V semiconductors; chemical vapour deposition; current density; gallium arsenide; semiconductor device measurement; semiconductor growth; silicon; tunnel diodes; Esaki diode; GaAs-InGaAs; PVCR; Si; aspect ratio trapping; chemical vapor deposition; current densities; metalorganic chemical vapor deposition; peak-to-valley current ratios; tunnel diodes; Chemical vapor deposition; Current measurement; Density measurement; Diodes; Epitaxial layers; Fabrication; Gallium arsenide; Indium gallium arsenide; Molecular beam epitaxial growth; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 2008. IEDM 2008. IEEE International
Conference_Location :
San Francisco, CA
ISSN :
8164-2284
Print_ISBN :
978-1-4244-2377-4
Electronic_ISBN :
8164-2284
Type :
conf
DOI :
10.1109/IEDM.2008.4796801
Filename :
4796801
Link To Document :
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