Title :
Surface-micromachined 2D optical scanners with high-porformance single-crystalline silicon micromirrors
Author :
Su, G.-D.J. ; Hung Nguyen ; Paterson, P. ; Toshiyoshi, H. ; Wu, M.C.
Author_Institution :
University of California
Keywords :
Actuators; Crystallization; Micromechanical devices; Micromirrors; Mirrors; Optical films; Optical interferometry; Rough surfaces; Surface roughness;
Conference_Titel :
Lasers and Electro-Optics, 2000. (CLEO 2000). Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-634-6
DOI :
10.1109/CLEO.2000.907509
