Title :
Comparison of acoustic wave pressure sensors for TPMS applications
Author :
Nagaraju, Manohar B. ; Sridaran, Suresh ; Lingley, Andrew R. ; Larson, John D. ; Otis, Brian P. ; Ruby, Richard C.
Author_Institution :
Electr. Eng., Univ. of Washington, Seattle, WA, USA
Abstract :
We study and compare the pressure sensitivities of different area Rayleigh Lamb wave (RL) mode (S1 mode) and FBAR resonators. The studied RL-mode and FBAR resonators operate at 785MHz and 628MHz respectively. The resonators are fabricated on a released membrane with AlN as the piezoelectric layer. The resonators are hermetically sealed and the manufacturing process uses standard micromachining techniques throughout. The devices exhibit a pressure sensitivity over a range of 15 - 80psi, suitable for Tire Pressure Monitoring Systems (TPMS). The sensitivities of different area resonators are compared.
Keywords :
Rayleigh waves; condition monitoring; crystal resonators; hermetic seals; micromachining; microsensors; pressure sensors; surface acoustic wave resonators; surface acoustic wave sensors; tyres; FBAR resonators; RL-mode; Rayleigh Lamb wave mode; TPMS applications; acoustic wave pressure sensors; frequency 628 MHz; frequency 785 MHz; hermetic seal; manufacturing process; piezoelectric layer; standard micromachining technique; tire pressure monitoring system; Film bulk acoustic resonators; Mathematical model; Resonant frequency; Sensitivity; Sensors; Standards; Stress;
Conference_Titel :
Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4799-8865-5
DOI :
10.1109/FCS.2015.7138824
