Title :
Step Modelling of a High Precision 2DoF (Linear-Angular) Microsystem
Author :
Rakotondrabe, M. ; Haddab, Y. ; Lutz, P.
Author_Institution :
Laboratoire d’Automatique de Besançon - CNRS UMR6596 Université de Franche-Comté - ENSMM 24, rue Alain Savary 25000 Besançon - France mrakoton@ens2m.fr
Abstract :
In this paper, a new type of microsystem is presented : a system able to perform linear and angular motion. First, the microactuator used is studied. An approximation of the working equations is proposed in accordance with Finite-Element simulation. The microactuator used is inserted in the microsystem and a separated modelling of the whole system in linear and in angular motion is given. Stick and skid phases of each motion are independently studied.
Keywords :
Step modelling; linear-angular motion; piezoelectric microactuators; Electric potential; Equations; Microactuators; Microassembly; Robotics and automation; Step modelling; linear-angular motion; piezoelectric microactuators;
Conference_Titel :
Robotics and Automation, 2005. ICRA 2005. Proceedings of the 2005 IEEE International Conference on
Print_ISBN :
0-7803-8914-X
DOI :
10.1109/ROBOT.2005.1570111
