Cromwell, E.F. ; Clark, B. ; Gob, W. ; Brock, S. ; Han, T.K. ; Saperstein, D.D.
Author_Institution :
StorMedia, Inc.
fYear :
1996
fDate :
19-21 Aug. 1996
Keywords :
Atom optics; Atomic force microscopy; Magnetic field measurement; Measurement techniques; Optical interferometry; Optical microscopy; Optical scattering; Process control; Shape control; Shape measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetic Recording Conference 1996. Magnetic Recording Media., Digests of the