Soft Magnetic Properties of Obliquely Deposited Co-Zr-O Granular Films

Author

Sun, Y. ; Li, W. ; Kopp, D. ; Johnson, F. ; Taylor, S.T. ; Sullivan, C.R.

Author_Institution

Dartmouth Coll., Hanover

fYear

2006

fDate

8-12 May 2006

Firstpage

42

Lastpage

42

Abstract

This work first studied the magnetic properties of obliquely deposited granular Co-Zr-O films. It was found that the oblique deposition induces increased hysteresis and decreased permeability in the films, which leads to larger loss and less inductance in the micro-inductor applications. Applying substrate bias during film deposition is an effective method to eliminate the influence of oblique deposition in Permalloy and Fe-based soft magnetic films. The use of a multilayer structure Co-Zr-O/ZrO_x was also investigated and was found to provide better results.

Keywords

cobalt compounds; granular materials; magnetic hysteresis; magnetic multilayers; magnetic permeability; magnetic thin films; soft magnetic materials; zirconium compounds; CoZrO-ZrO; hysteresis; multilayer structure; obliquely deposited granular films; permeability; soft magnetic properties; substrate bias; Anisotropic magnetoresistance; Argon; Cobalt; Magnetic films; Magnetic multilayers; Magnetic properties; Perpendicular magnetic anisotropy; Soft magnetic materials; Sputtering; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 2006. INTERMAG 2006. IEEE International

Conference_Location

San Diego, CA

Print_ISBN

1-4244-1479-2

Type

conf

DOI

10.1109/INTMAG.2006.375542

Filename

4261476