Soft Magnetic Properties of Obliquely Deposited Co-Zr-O Granular Films

This work first studied the magnetic properties of obliquely deposited granular Co-Zr-O films. It was found that the oblique deposition induces increased hysteresis and decreased permeability in the films, which leads to larger loss and less inductance in the micro-inductor applications. Applying substrate bias during film deposition is an effective method to eliminate the influence of oblique deposition in Permalloy and Fe-based soft magnetic films. The use of a multilayer structure Co-Zr-O/ZrO_x was also investigated and was found to provide better results.