Title :
A vibrating wheel micromachined gyroscope for commercial and automotive applications
Author :
Dong, Yuqian ; Gao, Zhongyu ; Zhang, Rong ; Chen, Zhiyong
Author_Institution :
Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
Abstract :
Vibratory wheel micromachined gyroscopes with electrostatic drive and capacitance detection are presented. The angular rate measurement is performed with an exciting voltage of 10 Vpp(AC) plus 5 V(DC) in atmosphere. Resolution better than 3°/s has been recorded with self-drive oscillation. In this paper, the following topics are covered: the structure and fabrication of the micromachined gyroscopes, the principle of operation, electronics, control systems, sensitivity as well as projected and measured performance. Associated phenomena and further studies also will be addressed. Resolution better than 1°/s to meet the automotive application will be available in the near future
Keywords :
automotive electronics; capacitive sensors; gyroscopes; micromachining; microsensors; vibrations; angular rate measurement; automotive applications; capacitance detection; commercial applications; electrostatic drive; self-drive oscillation; vibrating wheel micromachined gyroscope; Atmosphere; Atmospheric measurements; Capacitance; Control systems; Electrostatic measurements; Fabrication; Gyroscopes; Performance evaluation; Voltage; Wheels;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1999. IMTC/99. Proceedings of the 16th IEEE
Conference_Location :
Venice
Print_ISBN :
0-7803-5276-9
DOI :
10.1109/IMTC.1999.776122
