Title :
Magnetic properties of nanocrystalline and amorphous FeCoC thin films
Author :
Miyao, T. ; Liu, X. ; Morisako, A.
Author_Institution :
Shinshu Univ., Nagano
Abstract :
In this paper, FeCoC films have been prepared by a reactive sputtering process. Acetylene (C2H2) gas, incorporated with argon gas was introduced into the chamber during the sputtering process. The carbon composition in the film can be controlled in a wide range by this process. The magnetic, crystallographic and microstructure of the films have been characterized. Films with 4piMs of 23.5 kG, the coercivity in hard axis and easy axis of 1.3 Oe, and the electrical resistivity of 120 muOmega-cm have been prepared.
Keywords :
amorphous magnetic materials; cobalt alloys; coercive force; crystal microstructure; crystal structure; electrical resistivity; ferromagnetic materials; iron alloys; magnetic thin films; nanostructured materials; soft magnetic materials; sputter deposition; FeCoC; acetylene gas; amorphous thin films; argon gas; carbon composition; coercivity; crystallography; electrical resistivity; film microstructure; nanocrystalline thin films; reactive sputtering process; resistivity 120 muohmcm; soft magnetic thin films; Amorphous magnetic materials; Amorphous materials; Argon; Coercive force; Crystallography; Electric resistance; Magnetic films; Magnetic properties; Microstructure; Sputtering;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.375547
