A precision contactless trajectory control for moving-element electrometric systems

Author

Cabiati, F. ; Trapella, S. ; D´Elia, V.

Author_Institution

Ist. Elettrotecnico Nazionale Galileo Ferraris, Torino, Italy

fYear

1998

fDate

6-10 July 1998

Firstpage

112

Lastpage

113

Abstract

Virtual constraints acting like contactless guides are obtained using eccentricity transducers and electrostatic actuators designed for cylindrical geometry. The experimental study is finalized to avoid instability in electrometric systems for absolute measurements that involve the kinematics of the moving element. A nearly nanometric resolution and a two orders of magnitude reduction of the displacement from the assigned trajectory are presented as interim results.

Keywords

balances; bridge circuits; capacitive sensors; electrometers; electrostatic actuators; mass measurement; position control; absolute measurements; automatic control system; bridge unbalance signal; capacitive displacement sensors; contactless guides; cylindrical geometry; eccentricity transducers; electrostatic actuators; feedback loops; moving element kinematics; moving-element electrometric systems; nearly nanometric resolution; precision contactless trajectory control; virtual constraints; voltage balance; Bridge circuits; Capacitance; Centralized control; Control systems; Displacement control; Electrodes; Electrostatic actuators; Proportional control; Transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements Digest, 1998 Conference on

Conference_Location

Washington, DC, USA

Print_ISBN

0-7803-5018-9

Type

conf

DOI

10.1109/CPEM.1998.699808

Filename

699808