Title :
MR Wafer Fabrication Technology: Current And Future Perspectives
Author :
Baubock, G. ; Huan Q.Dang ; Hinson, D.C. ; Kim, Y.K. ; Rea, L.L.
Author_Institution :
Quantum Peripherals Colorado, Inc.
Keywords :
Fabrication; Identity-based encryption; Ion beams; Magnetic sensors; Magnetostriction; Resists; Sputter etching; Substrates; Thick film sensors;
Conference_Titel :
Magnetic Recording Conference 1995. Magnetic Recording Heads., Digest of the
Conference_Location :
Pittsburgh, PA, USA
DOI :
10.1109/MRC.1995.658241
