Title :
Position Sensing And Control Of Electrostatically-driven Polysilicon Microactuators
Author :
Horowitz, R. ; Cheung, P. ; Howe, R.T.
Author_Institution :
University of California at Berkeley
Keywords :
Capacitance measurement; Capacitors; Electrostatic actuators; Fingers; Microactuators; Microwave integrated circuits; Parasitic capacitance; Position measurement; Silicon; Springs;
Conference_Titel :
Magnetic Recording Conference 1995. Magnetic Recording Heads., Digest of the
Conference_Location :
Pittsburgh, PA, USA
DOI :
10.1109/MRC.1995.658256
