• DocumentCode
    2935156
  • Title

    Position Sensing And Control Of Electrostatically-driven Polysilicon Microactuators

  • Author

    Horowitz, R. ; Cheung, P. ; Howe, R.T.

  • Author_Institution
    University of California at Berkeley
  • fYear
    1995
  • fDate
    10-12 July 1995
  • Keywords
    Capacitance measurement; Capacitors; Electrostatic actuators; Fingers; Microactuators; Microwave integrated circuits; Parasitic capacitance; Position measurement; Silicon; Springs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetic Recording Conference 1995. Magnetic Recording Heads., Digest of the
  • Conference_Location
    Pittsburgh, PA, USA
  • Type

    conf

  • DOI
    10.1109/MRC.1995.658256
  • Filename
    658256
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2935156