Title :
Effects of Magnetic Field Annealing on a Micro-fluxgate Sensor
Author :
Na, K. ; Yuan, J. ; Choi, S.
Author_Institution :
Samsung Adv. Inst. of Technol., Yongin
Abstract :
A silicon based micro-fluxgate sensor with a cobalt based amorphous soft magnetic core for electronic compass is presented in this paper, and effects of magnetic field annealing were tested under 3 different field directions (length, width, and rotation) for improving the sensor´s performance.
Keywords :
cobalt alloys; magnetic annealing; microsensors; niobium alloys; sputtered coatings; zirconium alloys; CoNbZr; amorphous soft magnetic core; electronic compass; magnetic field annealing; microfluxgate sensor; sputter deposition; Actuators; Annealing; Coils; Fabrication; Linearity; Magnetic cores; Magnetic field measurement; Magnetic fields; Magnetic sensors; Sensor systems;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.375634
