DocumentCode
2935349
Title
Effects of Magnetic Field Annealing on a Micro-fluxgate Sensor
Author
Na, K. ; Yuan, J. ; Choi, S.
Author_Institution
Samsung Adv. Inst. of Technol., Yongin
fYear
2006
fDate
8-12 May 2006
Firstpage
134
Lastpage
134
Abstract
A silicon based micro-fluxgate sensor with a cobalt based amorphous soft magnetic core for electronic compass is presented in this paper, and effects of magnetic field annealing were tested under 3 different field directions (length, width, and rotation) for improving the sensor´s performance.
Keywords
cobalt alloys; magnetic annealing; microsensors; niobium alloys; sputtered coatings; zirconium alloys; CoNbZr; amorphous soft magnetic core; electronic compass; magnetic field annealing; microfluxgate sensor; sputter deposition; Actuators; Annealing; Coils; Fabrication; Linearity; Magnetic cores; Magnetic field measurement; Magnetic fields; Magnetic sensors; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location
San Diego, CA
Print_ISBN
1-4244-1479-2
Type
conf
DOI
10.1109/INTMAG.2006.375634
Filename
4261568
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