Title :
Development of a Linear Micro Inductosyn Sensor
Author :
Dinulovic, D. ; Hermann, D. ; Fluegge, J. ; Gatzen, H.
Author_Institution :
Hanover Univ., Garbsen
Abstract :
Incremental inductive systems with interpolation capabilities allow lend themselves for miniaturization. The goal is the development of an inductive micro position measuring system principally based on the "inductosyn" principle and its fabrication in thin film fabrication technology. Inductive measuring systems in thin film technology feature a large degree of integration, miniaturization, and low manufacturing costs.
Keywords :
Permalloy; coils; copper; electromagnetic induction; interpolation; micropositioning; microsensors; thin films; Ni81Fe19-Cu; incremental inductive systems; inductive microposition measuring system; interpolation; linear micro inductosyn sensor; low manufacturing costs; miniaturization; thin film fabrication; Coils; Distortion measurement; Fabrication; Interpolation; Magnetic flux; Magnetic materials; Manufacturing; Position measurement; Soft magnetic materials; Transistors;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.375635
