Research of 3D Spatial Localizing System Based on PSD Sensor

PSD(Position Sensitive Detector) is the sensor which can provide continuous data of location, when its surface is scanned by the laser light. The 3D Spatial Localizing technology is achieved by dual 2D PSD sensors. The principle and the characteristics of 2D PSD are described in detail, and the spatial localizing algorithm of PSD array formed by two axis- parallel-placed 2D PSD is researched. Using the algorithm, we design a reliable system on the targeting Spatial location. The measurement error of the system and the reason are analysed. Through experiments, we know that the Localizing resolution of the system is 1 um and the error is less than 5 um. The system has many features, such as high resolution, fast responsive time ,strong anti-interference,the circuit to deal with simply, convenient interface. so it is an ideal non-contact Spatial Localizing system.