• DocumentCode
    293857
  • Title

    Studies of large area silicon microstrip sensors

  • Author

    Tsay, Wen-Chin ; Hong, Jhy-Wong ; Chang, Y.H. ; Chen, A. ; Hou, S.R. ; Hsu, S.L. ; Lin, C.H. ; Lin, Willis T. ; Ting, Hsien-Jen ; Song-Tsang Chiang ; Chuang, Emily ; Hwang, Su-Wen

  • Author_Institution
    Dept. of Electr. Eng., Nat. Central Univ., Chung-Li, Taiwan
  • Volume
    1
  • fYear
    1994
  • fDate
    30 Oct-5 Nov 1994
  • Firstpage
    160
  • Abstract
    Aiming at future large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and processes related to such sensors were: studied. Fabrication of 4×8 cm2 silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm2 long ladder, by assembling eight pieces of 4×8 cm2 sensors together, had been tested at CERN SPS area. Test result shows such a detector is feasible
  • Keywords
    silicon radiation detectors; CERN SPS; Si microstrip sensors; large area silicon microstrip sensors; large silicon tracking devices; wafers; yield rate; Assembly; Detectors; Leakage current; Microstrip; P-n junctions; Process design; Resistors; Silicon; Strips; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium and Medical Imaging Conference, 1994., 1994 IEEE Conference Record
  • Conference_Location
    Norfolk, VA
  • Print_ISBN
    0-7803-2544-3
  • Type

    conf

  • DOI
    10.1109/NSSMIC.1994.474368
  • Filename
    474368
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=293857