Title :
Studies of large area silicon microstrip sensors
Author :
Tsay, Wen-Chin ; Hong, Jhy-Wong ; Chang, Y.H. ; Chen, A. ; Hou, S.R. ; Hsu, S.L. ; Lin, C.H. ; Lin, Willis T. ; Ting, Hsien-Jen ; Song-Tsang Chiang ; Chuang, Emily ; Hwang, Su-Wen
Author_Institution :
Dept. of Electr. Eng., Nat. Central Univ., Chung-Li, Taiwan
fDate :
30 Oct-5 Nov 1994
Abstract :
Aiming at future large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and processes related to such sensors were: studied. Fabrication of 4×8 cm2 silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm2 long ladder, by assembling eight pieces of 4×8 cm2 sensors together, had been tested at CERN SPS area. Test result shows such a detector is feasible
Keywords :
silicon radiation detectors; CERN SPS; Si microstrip sensors; large area silicon microstrip sensors; large silicon tracking devices; wafers; yield rate; Assembly; Detectors; Leakage current; Microstrip; P-n junctions; Process design; Resistors; Silicon; Strips; Testing;
Conference_Titel :
Nuclear Science Symposium and Medical Imaging Conference, 1994., 1994 IEEE Conference Record
Conference_Location :
Norfolk, VA
Print_ISBN :
0-7803-2544-3
DOI :
10.1109/NSSMIC.1994.474368
