Title :
Electromagnetic micro power generator on Silicon for wireless sensor nodes
Author :
Kulkarni, S. ; Roy, S. ; Donnell, T.O. ; Beeby, S. ; Tudor, J.
Author_Institution :
Tyndall Nat. Inst., Cork
Abstract :
This paper discusses design, simulation and batch-fabrication steps for two electromagnetic power generators, where design 1 consists of two oppositely polarized vibrating Co50Pt50 face centered tetragonal phase (fct) hard magnets, between two sets of copper coils electroplated on silicon wafers and design 2 consists of Co50Pt50 magnets vibrating between copper coils electroplated over a soft magnetic, Ni45Fe55, layer. The volume of the device is about 43mm3.
Keywords :
cobalt alloys; electric generators; electromagnetic devices; iron alloys; nickel alloys; permanent magnets; platinum alloys; power supplies to apparatus; silicon; soft magnetic materials; Co50Pt50; Ni45Fe55; copper coils; electromagnetic micropower generator; electroplating; face centered tetragonal phase; hard magnets; polarized vibration; silicon wafers; soft magnetic layer; wireless sensor nodes; Coils; Copper; Electromagnetic wave polarization; Iron; Magnetic sensors; Magnets; Power generation; Silicon; Soft magnetic materials; Wireless sensor networks;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.375899
