Capacitive Silicon Micro-accelerometer Detecting Technology Research

In order to increase the capacitive accelerometer testing accuracy, to increase its usefulness, the comb-capacitive accelerometer is selected, the use of capacitive differential detection principle to detect acceleration changes; Based on the capacitance charge-discharge characteristics, design the small differential capacitance detection circuit, including C-V converter, differential amplification, full-wave rectifier. Each module for the simulation. Finally, capacitive accelerometer do the static test and dynamic test on the two state linearity comparison shows that this design increase not only the capacitive accelerometer linearity, but also its usefulness.