Title :
A Novel Hybrid Micromirror for Large Apertures Laser Application
Author :
Li, Jie ; Chen, Xiqu
Author_Institution :
Dept. of Electr. & Inf. Eng., Wuhan Polytech. Univ., Wuhan, China
Abstract :
A novel hybrid surface micromachined segmented mirror array is described. This device is capable of scaling to large apertures for correcting time-varying aberrations in laser applications . Each mirror is composed of bottom electrode, support part and mirror plate, in which a T type beam structure is used to support the mirror plate. It can provide mirror with the vertical movement and the rotation around two horizontal axes. The test results show that the maximum deflection along the vertical direction of the mirror plate is 2 um, while the rotation angle around X and Y axis are ±±2.3o and ±1.45° respectively.
Keywords :
laser beam applications; laser mirrors; micromachining; micromirrors; bottom electrode; hybrid micromirror; large apertures; laser applications; micromachined segmented mirror array; time varying aberrations; Adaptive optics; Apertures; Electrodes; Laser applications; Micromechanical devices; Micromirrors; Mirrors; Optical arrays; Phased arrays; Pistons;
Conference_Titel :
Photonics and Optoelectronic (SOPO), 2010 Symposium on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-4963-7
Electronic_ISBN :
978-1-4244-4964-4
DOI :
10.1109/SOPO.2010.5504334
