Two-dimensional two-photon laser induced fluorescence imaging of atomic hydrogen in low pressure chemical vapor deposition

Summary form only given. Two-dimensional images of relative atomic hydrogen concentration in reactive gas layers were produced using two-photon laser induced fluorescence. The measurements were made below the substrate. Concentration maps were obtained under parametric variation of the deposition conditions. Collisional de-excitation (quenching) has been performed to scale the results with the absolute atomic H number density. A comparison with growth results was made to analyze the effect of the transport of atomic hydrogen through the reactive layer in the diamond CVD process. The results can also be employed for the validation of kinetic modelling and in optimization of the CVD process.