Title :
Quality factor enhancement of an Atomic Force Microscope micro-cantilever using piezoelectric shunt control
Author :
Fairbairn, Matthew W. ; Moheimani, S. O Reza
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia
Abstract :
The quality (Q) factor of the Atomic Force Microscope (AFM) micro-cantilever influences both the maximum scan speed and image quality when operating in tapping mode. Increasing the Q factor of the micro-cantilever results in an increase in force sensitivity and a reduction in tapping force. Active piezoelectric shunt control uses an active electrical impedance to modify the mechanical dynamics of the cantilever. An increase in the effective Q factor of a piezoelectric AFM micro-cantilever by over 25 times has been demonstrated using this technique.
Keywords :
Q-factor; atomic force microscopy; force sensors; microactuators; piezoelectric actuators; Q factor; active electrical impedance; atomic force microscope microcantilever; force sensitivity; mechanical dynamics; piezoelectric AFM microcantilever; piezoelectric shunt control; quality factor enhancement; tapping force reduction; Force; Frequency response; Impedance; Q factor; Resistance; Surface impedance; Transfer functions;
Conference_Titel :
Advanced Intelligent Mechatronics (AIM), 2012 IEEE/ASME International Conference on
Conference_Location :
Kachsiung
Print_ISBN :
978-1-4673-2575-2
DOI :
10.1109/AIM.2012.6265890