Title :
On actuator-sensor selection in thermal processes
Author :
Kosut, Robert L. ; Kabuli, M. Güntekin
Author_Institution :
Integrated Syst. Inc., Santa Clara, CA, USA
Abstract :
A first-principles based nonlinear algebraic model of a rapid thermal processing chamber is used to consider an actuator-sensor selection problem based on static (steady-state) performance. A two step systematic procedure is proposed and illustrated on an example. Actuator groupings are ranked according to the achievable best nominal uniformity level. Once the actuator groupings are determined, the sensor locations are rated according to the best worst-case achievable closed-loop performance
Keywords :
actuators; feedback; integrated circuit manufacture; process control; rapid thermal processing; temperature control; temperature sensors; actuator groupings; actuator selection; closed-loop performance; nonlinear algebraic model; rapid thermal processing; semiconductor wafer processing; sensor locations; sensor selection; uniformity level; Actuators; Chemical sensors; Control design; Cooling; Lamps; Rapid thermal processing; Remote sensing; Steady-state; Temperature sensors; Thermal conductivity;
Conference_Titel :
Decision and Control, 1995., Proceedings of the 34th IEEE Conference on
Conference_Location :
New Orleans, LA
Print_ISBN :
0-7803-2685-7
DOI :
10.1109/CDC.1995.478463
