• DocumentCode
    2942992
  • Title

    The inverse magnetic shape memory effect in membranes for pressure sensor applications

  • Author

    Stephan, J.M. ; Retan, K. ; Ruther, P. ; Paul, O.

  • Author_Institution
    Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
  • fYear
    2012
  • fDate
    28-31 Oct. 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper presents the basis for a novel pressure sensor application based on the ferromagnetic shape memory alloy (FSMA) NiMnGa. Usually, the underlying mechanism for sensing applications using FSMAs is a martensitic reorientation accompanied by a change of magnetization. The magnetization change upon application of mechanical stress can be measured using a magnetic field sensor. We demonstrate that martensitic reorientations are detectable in pressurized membranes despite the complex distribution of mechanical stress arising in such geometries. Further, a change of magnetization within the FSMA membranes was detected using a giant magnetoresistance (GMR) sensor. The experimental results serve as a proof of concept for a membrane-based pressure sensor using FSMAs.
  • Keywords
    gallium alloys; giant magnetoresistance; magnetic sensors; manganese alloys; membranes; nickel alloys; pressure sensors; FSMA membranes; GMR sensor; NiMnGa; ferromagnetic shape memory alloy; giant magnetoresistance sensor; inverse magnetic shape memory effect; magnetic field sensor; magnetization change; martensitic reorientation; martensitic reorientations; mechanical stress distribution; membrane-based pressure sensor; pressurized membranes; Magnetic anisotropy; Magnetic field measurement; Magnetic flux; Magnetization; Magnetomechanical effects; Shape memory alloys; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2012 IEEE
  • Conference_Location
    Taipei
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4577-1766-6
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2012.6411030
  • Filename
    6411030