DocumentCode :
2942992
Title :
The inverse magnetic shape memory effect in membranes for pressure sensor applications
Author :
Stephan, J.M. ; Retan, K. ; Ruther, P. ; Paul, O.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
fYear :
2012
fDate :
28-31 Oct. 2012
Firstpage :
1
Lastpage :
4
Abstract :
This paper presents the basis for a novel pressure sensor application based on the ferromagnetic shape memory alloy (FSMA) NiMnGa. Usually, the underlying mechanism for sensing applications using FSMAs is a martensitic reorientation accompanied by a change of magnetization. The magnetization change upon application of mechanical stress can be measured using a magnetic field sensor. We demonstrate that martensitic reorientations are detectable in pressurized membranes despite the complex distribution of mechanical stress arising in such geometries. Further, a change of magnetization within the FSMA membranes was detected using a giant magnetoresistance (GMR) sensor. The experimental results serve as a proof of concept for a membrane-based pressure sensor using FSMAs.
Keywords :
gallium alloys; giant magnetoresistance; magnetic sensors; manganese alloys; membranes; nickel alloys; pressure sensors; FSMA membranes; GMR sensor; NiMnGa; ferromagnetic shape memory alloy; giant magnetoresistance sensor; inverse magnetic shape memory effect; magnetic field sensor; magnetization change; martensitic reorientation; martensitic reorientations; mechanical stress distribution; membrane-based pressure sensor; pressurized membranes; Magnetic anisotropy; Magnetic field measurement; Magnetic flux; Magnetization; Magnetomechanical effects; Shape memory alloys; Stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
ISSN :
1930-0395
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2012.6411030
Filename :
6411030
Link To Document :
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