All digital control system for a novel high frequency force sensor in non contact atomic force microscopy

Author

Bouloc, J. ; Nony, L. ; Loppacher, C. ; Rahajandraibe, W. ; Bocquet, F. ; Zaid, L.

Author_Institution

IM2NP, Aix-Marseille Univ., Marseille, France

fYear

2012

fDate

28-31 Oct. 2012

Firstpage

1

Lastpage

4

Abstract

A new tunable control system for frequency modulation atomic force microscope (FM-AFM) using novel high frequency force sensors is presented. It is based on a phase locked loop (PLL) to detect the frequency shift that is used for the tip-surface distance control in FM-AFM. Furthermore, an amplitude proportional integral controller (APIC) was implemented to drive the cantilever at its resonance frequency. The system can achieve very high frequency resolution (0.1Hz) within a frequency range of 20kHz to 60MHz.

Keywords

PI control; atomic force microscopy; force sensors; frequency measurement; frequency modulation; phase locked loops; APIC; FM-AFM; PLL; all digital control system; amplitude proportional integral controller; cantilever; frequency 0.1 THz; frequency 20 kHz to 60 MHz; frequency modulation atomic force microscope; frequency shift detection; high frequency force sensor; noncontact atomic force microscopy; phase locked loop; resonance frequency; tip-surface distance control; tunable control system; Finite impulse response filter; Frequency control; Frequency modulation; Low pass filters; Phase locked loops; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2012 IEEE

Conference_Location

Taipei

ISSN

1930-0395

Print_ISBN

978-1-4577-1766-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2012.6411039

Filename

6411039