Title :
All digital control system for a novel high frequency force sensor in non contact atomic force microscopy
Author :
Bouloc, J. ; Nony, L. ; Loppacher, C. ; Rahajandraibe, W. ; Bocquet, F. ; Zaid, L.
Author_Institution :
IM2NP, Aix-Marseille Univ., Marseille, France
Abstract :
A new tunable control system for frequency modulation atomic force microscope (FM-AFM) using novel high frequency force sensors is presented. It is based on a phase locked loop (PLL) to detect the frequency shift that is used for the tip-surface distance control in FM-AFM. Furthermore, an amplitude proportional integral controller (APIC) was implemented to drive the cantilever at its resonance frequency. The system can achieve very high frequency resolution (0.1Hz) within a frequency range of 20kHz to 60MHz.
Keywords :
PI control; atomic force microscopy; force sensors; frequency measurement; frequency modulation; phase locked loops; APIC; FM-AFM; PLL; all digital control system; amplitude proportional integral controller; cantilever; frequency 0.1 THz; frequency 20 kHz to 60 MHz; frequency modulation atomic force microscope; frequency shift detection; high frequency force sensor; noncontact atomic force microscopy; phase locked loop; resonance frequency; tip-surface distance control; tunable control system; Finite impulse response filter; Frequency control; Frequency modulation; Low pass filters; Phase locked loops; Resonant frequency;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411039
