Title :
Microcantilever Torque Magnetometery Study of Patterned Magnetic Films
Author :
Yuan, L. ; Gao, L. ; Sabirianov, R. ; Liou, S.H. ; Chabot, M.D. ; Min, D.H. ; Moreland, J. ; Han, B.
Author_Institution :
Univ. of Nebraska-Lincoln, Lincoln
Abstract :
In this work, we develop a new process for preparing patterned magnetic film on cantilever and show a primarily result of magnetic interactions in a paired magnetic bar measured by MTM. The process of patterning the magnetic film on the cantilever is following: (a) deposit a multilayer Au (200nm)/Cr (10nm) on cantilever, (b) patterning using a focused ion beam (FIB) milling, (c) magnetic film deposition through a mask, and (d) a lift-off process.
Keywords :
cantilevers; focused ion beam technology; iron alloys; magnetic thin films; magnetometers; masks; metallic thin films; micromechanical devices; multilayers; nickel alloys; FIB; NiFe; focused ion beam milling; lift-off process; magnetic film deposition; magnetic interactions; mask; microcantilever torque magnetometery; multilayer; paired magnetic bar; patterned magnetic films; Bars; Extraterrestrial measurements; Ion beams; Magnetic field measurement; Magnetic films; Magnetometers; Magnetostatics; Milling; Physics; Torque;
Conference_Titel :
Magnetics Conference, 2006. INTERMAG 2006. IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
1-4244-1479-2
DOI :
10.1109/INTMAG.2006.376307
