Title :
2007 international symposium on semiconductor manufacturing
Abstract :
The following topics are dealt with: manufacturing strategy and operations; supply chain integration; advanced process and metrology equipment; process and equipment control; factory design and automated materials handling; design for manufacture; manufacturing control and execution; green factory; yield enhancement and contamination control; and process and material optimization.
Keywords :
contamination; design for manufacture; environmental factors; factory automation; integrated circuit manufacture; integrated circuit measurement; integrated circuit yield; materials handling; semiconductor technology; supply chain management; advanced process; automated materials handling; contamination control; design for manufacture; equipment control; factory design; green factory; manufacturing control; manufacturing strategy; material optimization; metrology equipment; process control; process optimization; semiconductor manufacturing; supply chain integration; yield enhancement;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1141-2
DOI :
10.1109/ISSM.2007.4446782
