Title :
Integrated carbon nanotube-based sensor with CMOS processor for monitoring breath
Author :
Liu, Hung-Chang ; Huang, Wen-Chien ; Huang, Jung-Tang
Author_Institution :
Grad. Inst. of Mech. & Electr. Eng., Nat. Taipei Univ. of Technol., Taipei, Taiwan
Abstract :
Breath is one of vital functions for human. Development of an effective breath sensor to detect apnea is important issue in medical care. A new technology with integration of CMOS circuits and nano electromechanical system (NEMS) as breath sensor has been presented. Through a specifically treated procedure, multi-walled carbon nanotubes (MWCNTs) were immobilized on a silicon wafer. Techniques by photolithography and sputtering were then implemented on the MWCNT film to develop micro interdigitated electrodes as the basic structure of a breath sensor. The sensor was connected to a programmed Microchip operator to become a warning device for abnormal human breath. In this preliminary study with variable patterns of simulated tests to volunteers, MWCNT sensor combined with a CMOS processor could response rapidly and effectively as a detector for exhaled breath flow. Our results highlight that integrated CMOS circuits and NEMS could improve the pattern of respiratory care in the future.
Keywords :
CMOS integrated circuits; biomedical electrodes; biosensors; carbon nanotubes; microprocessor chips; nanolithography; nanosensors; patient care; photolithography; pneumodynamics; sputtering; CMOS circuit processor; MWCNT film; MWCNT sensor; NEMS; abnormal human breath; apnea detection; breath monitoring; breath sensor; exhaled breath flow; human; integrated carbon nanotube-based sensor; interdigitated electrodes; medical care; multiwalled carbon nanotubes; nanoelectromechanical system; photolithography; programmed microchip operator; silicon wafer; sputtering technique; vital functions; warning device; CMOS integrated circuits; Carbon nanotubes; Humans; Monitoring; Nanoelectromechanical systems; Temperature measurement; Testing;
Conference_Titel :
Advanced Intelligent Mechatronics (AIM), 2012 IEEE/ASME International Conference on
Conference_Location :
Kachsiung
Print_ISBN :
978-1-4673-2575-2
DOI :
10.1109/AIM.2012.6265966