Integrated carbon nanotube-based sensor with CMOS processor for monitoring breath

Breath is one of vital functions for human. Development of an effective breath sensor to detect apnea is important issue in medical care. A new technology with integration of CMOS circuits and nano electromechanical system (NEMS) as breath sensor has been presented. Through a specifically treated procedure, multi-walled carbon nanotubes (MWCNTs) were immobilized on a silicon wafer. Techniques by photolithography and sputtering were then implemented on the MWCNT film to develop micro interdigitated electrodes as the basic structure of a breath sensor. The sensor was connected to a programmed Microchip operator to become a warning device for abnormal human breath. In this preliminary study with variable patterns of simulated tests to volunteers, MWCNT sensor combined with a CMOS processor could response rapidly and effectively as a detector for exhaled breath flow. Our results highlight that integrated CMOS circuits and NEMS could improve the pattern of respiratory care in the future.