DocumentCode
2944003
Title
Optimized performance of automated material delivery by improved exception handling
Author
Rothe, Jan ; Georgi, Ralf ; Honold, Alfred ; Teichmann, Eberhard
Author_Institution
Adv. Micro Devices, Dresden
fYear
2007
fDate
15-17 Oct. 2007
Firstpage
1
Lastpage
4
Abstract
This paper presents the results of joint efforts by AMD, Qimonda, InReCon and Peer Group to identify overhead transport (OHT) performance limitations in 300 mm fabs as well as propose how to overcome some of these limitations by standardizing the handling of common exceptions.
Keywords
integrated circuit manufacture; materials handling equipment; reliability; semiconductor device manufacture; AMD; InReCon; Peer Group; Qimonda; SEMI standards; automated material delivery; exception handling; load port availability; overhead transport performance limitations; semiconductor industry; Condition monitoring; Electronics industry; Joining materials; Manufacturing automation; Materials handling; Metrology; Production equipment; Proposals; Semiconductor device manufacture; Vehicles;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
978-1-4244-1142-9
Electronic_ISBN
1523-553X
Type
conf
DOI
10.1109/ISSM.2007.4446798
Filename
4446798
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