Title :
Optimized performance of automated material delivery by improved exception handling
Author :
Rothe, Jan ; Georgi, Ralf ; Honold, Alfred ; Teichmann, Eberhard
Author_Institution :
Adv. Micro Devices, Dresden
Abstract :
This paper presents the results of joint efforts by AMD, Qimonda, InReCon and Peer Group to identify overhead transport (OHT) performance limitations in 300 mm fabs as well as propose how to overcome some of these limitations by standardizing the handling of common exceptions.
Keywords :
integrated circuit manufacture; materials handling equipment; reliability; semiconductor device manufacture; AMD; InReCon; Peer Group; Qimonda; SEMI standards; automated material delivery; exception handling; load port availability; overhead transport performance limitations; semiconductor industry; Condition monitoring; Electronics industry; Joining materials; Manufacturing automation; Materials handling; Metrology; Production equipment; Proposals; Semiconductor device manufacture; Vehicles;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446798
