Title :
Advanced simulation framework for AMHS
Author_Institution :
Asyst Shinko Inc., Ise
Abstract :
AMHS (automated material handling system) vendors are being expected not only to offer transport capabilities but also to guarantee its contribution to entire fab productivities. One of essential techniques for realizing this is estimation with using simulation studies prior to installation of AMHS into a fab. However traditional framework of AMHS simulation cannot enable to estimate entire fab productivities. This paper describes a new simulation framework for estimation of entire fab productivities, which describes what should be modeled and how they should be modeled.
Keywords :
materials handling; AMHS; advanced simulation framework; automated material handling system; fab productivities; fabrication productivity; transport capabilities; Buffer storage; Frequency; Materials handling; Position measurement; Production systems; Productivity; Queueing analysis;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446802
