Title :
Dynamic, weight-based sampling algorithm
Author_Institution :
Adv. Micro Devices, Austin
Abstract :
In this paper, a novel sampling algorithm that allows for multiple, independent rules to be efficiently merged into a single sampling decision will be presented. A brief discussion of past sampling technologies that motivated the development of the new system will also be included. Finally, the ability of the application to deal with various factory dynamics will be discussed.
Keywords :
measurement; sampling methods; independent rules; single sampling decision; weight-based sampling algorithm; Automatic control; Counting circuits; Etching; Heuristic algorithms; Manufacturing; Metrology; Monitoring; Production facilities; Resource management; Sampling methods;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446804
