• DocumentCode
    2944094
  • Title

    Dynamic, weight-based sampling algorithm

  • Author

    Purdy, Matthew

  • Author_Institution
    Adv. Micro Devices, Austin
  • fYear
    2007
  • fDate
    15-17 Oct. 2007
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In this paper, a novel sampling algorithm that allows for multiple, independent rules to be efficiently merged into a single sampling decision will be presented. A brief discussion of past sampling technologies that motivated the development of the new system will also be included. Finally, the ability of the application to deal with various factory dynamics will be discussed.
  • Keywords
    measurement; sampling methods; independent rules; single sampling decision; weight-based sampling algorithm; Automatic control; Counting circuits; Etching; Heuristic algorithms; Manufacturing; Metrology; Monitoring; Production facilities; Resource management; Sampling methods;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
  • Conference_Location
    Santa Clara, CA
  • ISSN
    1523-553X
  • Print_ISBN
    978-1-4244-1142-9
  • Electronic_ISBN
    1523-553X
  • Type

    conf

  • DOI
    10.1109/ISSM.2007.4446804
  • Filename
    4446804
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2944094