DocumentCode :
2944094
Title :
Dynamic, weight-based sampling algorithm
Author :
Purdy, Matthew
Author_Institution :
Adv. Micro Devices, Austin
fYear :
2007
fDate :
15-17 Oct. 2007
Firstpage :
1
Lastpage :
4
Abstract :
In this paper, a novel sampling algorithm that allows for multiple, independent rules to be efficiently merged into a single sampling decision will be presented. A brief discussion of past sampling technologies that motivated the development of the new system will also be included. Finally, the ability of the application to deal with various factory dynamics will be discussed.
Keywords :
measurement; sampling methods; independent rules; single sampling decision; weight-based sampling algorithm; Automatic control; Counting circuits; Etching; Heuristic algorithms; Manufacturing; Metrology; Monitoring; Production facilities; Resource management; Sampling methods;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
ISSN :
1523-553X
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
Type :
conf
DOI :
10.1109/ISSM.2007.4446804
Filename :
4446804
Link To Document :
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