DocumentCode
2944397
Title
Method of Overall Consumables Effectiveness
Author
Kikuchi, Kenji ; Kikuchi, Takashi ; Takai, Toshio
Author_Institution
Spansion Japan Ltd., Fukushima
fYear
2007
fDate
15-17 Oct. 2007
Firstpage
1
Lastpage
4
Abstract
Creating a new methodology, the OCE (Overall Consumables Effectiveness), will reduce the cost of Gases and Chemicals for semiconductor processing applying the OEE methods to cost reduction by using KAIZEN techniques resulted in a success story of our cost reduction by utilizing this method.
Keywords
continuous improvement; cost reduction; semiconductor device manufacture; KAIZEN technique; chemicals; cost reduction; gases; overall consumables effectiveness; semiconductor processing; Chemical analysis; Chemical processes; Cities and towns; Continuous improvement; Costs; Electronics industry; Gases; Manufacturing; Performance loss; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
978-1-4244-1142-9
Electronic_ISBN
1523-553X
Type
conf
DOI
10.1109/ISSM.2007.4446819
Filename
4446819
Link To Document