Title :
Method of Overall Consumables Effectiveness
Author :
Kikuchi, Kenji ; Kikuchi, Takashi ; Takai, Toshio
Author_Institution :
Spansion Japan Ltd., Fukushima
Abstract :
Creating a new methodology, the OCE (Overall Consumables Effectiveness), will reduce the cost of Gases and Chemicals for semiconductor processing applying the OEE methods to cost reduction by using KAIZEN techniques resulted in a success story of our cost reduction by utilizing this method.
Keywords :
continuous improvement; cost reduction; semiconductor device manufacture; KAIZEN technique; chemicals; cost reduction; gases; overall consumables effectiveness; semiconductor processing; Chemical analysis; Chemical processes; Cities and towns; Continuous improvement; Costs; Electronics industry; Gases; Manufacturing; Performance loss; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
978-1-4244-1142-9
Electronic_ISBN :
1523-553X
DOI :
10.1109/ISSM.2007.4446819
