Title :
Wideband visible wavelength range MEMS Fabry-Perot Tunable Filter with calibration system
Author :
Hrokubo, N. ; Komatsu, Hiroyoshi ; Hashimoto, Noriaki ; Sonehara, Makoto ; Sato, Takao
Author_Institution :
Core Technol. Dev. Center, Seiko Epson Corp., Fujimi-machi, Japan
Abstract :
We report the novel MEMS (Micro Electro Mechanical Systems) FPTF (Fabry-Perot Tunable Filter) and its calibration system that controls the wavelength of the transmission peak accurately in the wide wavelength range of visible light. The MEMS FPTF consists of the Fabry-Perot filter with Ag alloy mirrors, the electrostatic actuator and the capacitive gap sensor. The calibration system consists of the capacitive gap sensor, the capacitance measurement circuit and the voltage controller. By introducing the calibration system to MEMS FPTF, we had accomplished the wavelength accuracy less than ±1nm, which is required to the highly accurate spectrum measurement in the range from 400nm to 700nm.
Keywords :
Fabry-Perot interferometers; calibration; capacitance measurement; capacitive sensors; electrostatic actuators; microsensors; mirrors; optical filters; optical tuning; optical variables measurement; silver alloys; voltage control; Ag; FPTF; Fabry-Perot tunable filter; MEMS; calibration system; capacitance measurement circuit; capacitive gap sensor; electrostatic actuator; microelectromechanical system; spectrum measurement; transmission wavelength control; visible light; voltage controller; wavelength 400 nm to 700 nm; wideband visible wavelength range; Calibration; Electrostatic actuators; Micromechanical devices; Mirrors; Optical filters; Voltage measurement;
Conference_Titel :
Sensors, 2012 IEEE
Conference_Location :
Taipei
Print_ISBN :
978-1-4577-1766-6
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2012.6411107
